Design of a High Performance MEMS Pressure Sensor Array with Signal Conditioning Unit for Oceanographic Applications is a paper authored by C. Roy Chaudhuri, V. Natarajan, P. Chatterjee, S. Gangopadhyay, V. Sreeramamurthy, and H. Saha. It appears in the Sensors & Transducers Journal, Vol. 98, Issue 11, November 2008, pp. 83-95. It presents a design for a high performance MEMS pressure sensor array which would have a signal conditioning unit. It is intended for oceanographic purposes.
Ocean measurement parameters include salinity, temperature and pressure which up to now have been measured using research vessels or remote operating vehicles. Limitations of such vehicles include restriction to local environmental variables at a point in time. Discontinuity has been problematic for these approaches. Overcoming these limitations is anticipated through the use of miniaturized and inexpensive tools enabling continuous and accurate readings at ocean depths. The readings could furnish data about changes in ocean currents and coral growth.
The authors propose a design of a "piezoresistive pressure sensor array with separate bulk micromachined diaphragms of different dimensions on the same substrate for sensing a wide range of pressure with improved resolution and linearity." The paper goes into quite a bit of technical detail which includes multiple diagrams, graphs and mathematical expressions. The authors conclude by noting that the overall design has a high resolution advantage with the benefit of low power consumption. Its silicon based MEMS structure allows for miniaturization and integration. Ease of packaging for oceanographic uses was pointed to as another advantage.
Labels: MEMS